WebEP2 387 063B1 2 5 10 15 20 25 30 35 40 45 50 55 Description TECHNICAL FIELD OF THE INVENTION [0001] Embodiments of the present invention relate to a chamber for physical vapor deposition. Particularly, they relate to a chamber including a door and a housing. WebThe deposition system (100) in a semiconductor fabrication system provides a slotted grounded darkspace shield (130), which protects the edge portion of the target (110). It has been found that an axial slot (130) in the grounded darkspace shield can prevent eddy currents from flowing in the darkspace shield and thereby prevent RF power losses ...
DarkSpace - Wikipedia
Webspace shield (130), which protects the edge portion of the target (1 1 0). It has been found that an axial slot (1 30) in the grounded darkspace shield can prevent eddy cur- rents from flowing in the darkspace shield and thereby . prevent … Webamat 0021-03061 shield, inner, txz. yaskawa nnb sgmp-15a312 ac servo motor 1.5kw little scratched mot-i-1746=6a43. globe.n.j. 486dx4-100/buc amd pcb173 20100173 with pcb 20100011. asml 4022.472.58471 spm zerosensor laserbox assy sem-i-381=8f12. amat 0150-04842 c/a pwr sup to indexer a. mitsubishi amp gaa10a. euresys picolo … google play voucher
What Are Dark Space Shields? Plasmaterials
Webin an unslotted darkSpace Shield due to RF power applied to an RF coil-shield. By preventing the RF power losses, the RF coupling efficiency of RF power applied to the RF coil-shield can also be improved. 28 Claims, 5 Drawing Sheets . US 6,190,513 B1 Page 2 http://www.darkspace.net/?module=document.php&doc_id=14&chap_id=593&chap_name=2.55 google play voor computer